Keithley Instruments has published a semiconductor test reference handbook titled "Overcoming the Measurement Challenges of Advanced Semiconductor Technologies: DC, Pulsed, and RF - from Modeling to Manufacturing". The 140-page handbook describes emerging measurement challenges for semiconductor manufacturers as they move into the 65nm technology node and beyond. The handbook is available for no charge (See URI below).

The handbook draws from the collective experience of Keithley’s parametric test and device characterization experts and the company’s customers. It covers a variety of emerging technologies and processes, such as:

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Challenges in RF wafer testing

Gate dielectric reliability testing

Charge pumping and reliability

High frequency capacitance measurement

Copper via testing

Advanced SMU DC measurements

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The handbook also contains a glossary of commonly used terms in the semiconductor industry, including test and measurement terminology.