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IP blocks for MEMS accelerometers 02-06-11

X-Fab Silicon Foundries added ready-to-use design IP blocks for acceleration sensors to its MEMS foundry service offerings. Developed in cooperation with MicroMountains Applications and HSG-IMIT (Institute for Microtechnology and Information Technology of Hahn-Schickard-Gesellschaft), the new IP blocks can be incorporated into customer designs of MEMS capacitive accelerometers covering 2G, 10G and 100G ranges (G = G-force).

 

The accelerometer IP design blocks further shorten design times and reduce customer learning cycles for new product introduction. Running on X-Fab’s open platform inertial sensor process, the fully characterized IP blocks give customers the industry’s fastest development times for volume manufacture of gyroscope and accelerometer designs. The accelerometer IP provides design blocks that can be used as is for fully characterized accelerometers that are usefull for a wide range of applications – from motion sensing for games and toys to crash-detection for the automotive market.

 

The IP block development was done in cooperation with MicroMountains Applications and HSG-IMIT, creating IP for three broad application spaces. Development also included finite element analysis simulation of the sensor elements to gather important information about sensitivity, shock-resistance and frequency behavior of the structures.

 

After manufacturing the devices using X-FAB’s inertial sensor process platform, HSG-IMIT performed full characterization of the accelerometers. This was done using different rate-tables for 3-axis-simulation, temperature and vacuum in addition to shakers and temperature-chambers.

 
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